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Keywords: X-ray lithography
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Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. July 2005, 127(3): 537–547.
Published Online: January 8, 2005
...Daejong Kim; Dongmei Cao; Michael D. Bryant; Wenjin Meng; Frederick F. Ling Microsleeve bearings intended for microrotational machinery were fabricated by X-ray lithography and Ni electroplating. Coated to the working surfaces of the bearings was a 900 nm thick uniform tungsten hydrocarbon (W–C:H...
Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. October 2004, 126(4): 711–718.
Published Online: November 9, 2004
...Daejong Kim; Sanghoon Lee; Michael D. Bryant; Frederick F. Ling Hydrodynamic performance of gas microbearings, fabricated with deep X-ray lithography and electroplating, will be presented in this article. Static performance in terms of load parameters and attitude angles was calculated using...
