1-2 of 2
Keywords: X-ray lithography
Close
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Tribol. July 2005, 127(3): 537–547.
Published Online: January 8, 2005
...Daejong Kim; Dongmei Cao; Michael D. Bryant; Wenjin Meng; Frederick F. Ling Microsleeve bearings intended for microrotational machinery were fabricated by X-ray lithography and Ni electroplating. Coated to the working surfaces of the bearings was a 900 nm thick uniform tungsten hydrocarbon (W–C:H...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Tribol. October 2004, 126(4): 711–718.
Published Online: November 9, 2004
...Daejong Kim; Sanghoon Lee; Michael D. Bryant; Frederick F. Ling Hydrodynamic performance of gas microbearings, fabricated with deep X-ray lithography and electroplating, will be presented in this article. Static performance in terms of load parameters and attitude angles was calculated using...