This paper deals with a noncontact moving table using squeeze-film gas bearings for a linear motion guide, and investigates the dynamic behavior of the moving table under impulse load, experimentally and numerically, to clarify the dynamic characteristics of a squeeze-film gas bearing. This squeeze bearing for a noncontact moving table uses piezoelectric actuators as an ultrasonic vibrator to make the bearing surface vibrate at the ultrasonic resonant frequency of the bearing plate. The squeeze-film pressure is generated in the gap beneath the vibrating bearing surface and can support the moving table without any contact. It was consequently found that the numerical calculation method presented in this paper could predict well the dynamic behavior of the moving table using the squeeze-film gas bearing under impulse load.
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e-mail: yosimoto@rs.kagu.tus.ac.jp
e-mail: miyatake@rs.kagu.tus.ac.jp
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October 2009
Research Papers
Impulse-Load Dynamics of Squeeze Film Gas Bearings for a Linear Motion Guide
Yuji Ono,
Yuji Ono
Graduate Student
Department of Mechanical Engineering,
Tokyo University of Science
, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japan
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Shigeka Yoshimoto,
Shigeka Yoshimoto
Professor
Department of Mechanical Engineering,
e-mail: yosimoto@rs.kagu.tus.ac.jp
Tokyo University of Science
, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japan
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Masaaki Miyatake
Masaaki Miyatake
Assistant Professor
Department of Mechanical Engineering,
e-mail: miyatake@rs.kagu.tus.ac.jp
Tokyo University of Science
, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japan
Search for other works by this author on:
Yuji Ono
Graduate Student
Department of Mechanical Engineering,
Tokyo University of Science
, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japan
Shigeka Yoshimoto
Professor
Department of Mechanical Engineering,
Tokyo University of Science
, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japane-mail: yosimoto@rs.kagu.tus.ac.jp
Masaaki Miyatake
Assistant Professor
Department of Mechanical Engineering,
Tokyo University of Science
, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japane-mail: miyatake@rs.kagu.tus.ac.jp
J. Tribol. Oct 2009, 131(4): 041706 (6 pages)
Published Online: September 23, 2009
Article history
Received:
January 27, 2009
Revised:
July 10, 2009
Published:
September 23, 2009
Citation
Ono, Y., Yoshimoto, S., and Miyatake, M. (September 23, 2009). "Impulse-Load Dynamics of Squeeze Film Gas Bearings for a Linear Motion Guide." ASME. J. Tribol. October 2009; 131(4): 041706. https://doi.org/10.1115/1.3201894
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