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Proceedings Papers

Feasibility Study of a Capacitive MEMS Filter Using Electrostatic Levitation

Mark Pallay, Shahrzad Towfighian
Proc. ASME. IDETC-CIE2019, Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, V004T08A006, August 18–21, 2019
Paper No: DETC2019-97445
DOI: https://doi.org/10.1115/DETC2019-97445
View Paper titled, Feasibility Study of a Capacitive MEMS Filter Using Electrostatic Levitation
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Topics: Filters, Levitation, Microelectromechanical systems, Signals, Design, Electrodes, Sensors, Signal processing, Signal to noise ratio
Proceedings Papers

A MEMS Threshold Acceleration Switch Powered by a Triboelectric Generator

Mark Pallay, Alwathiqbellah I. Ibrahim, Shahrzad Towfighian
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A010, August 26–29, 2018
Paper No: DETC2018-85543
DOI: https://doi.org/10.1115/DETC2018-85543
View Paper titled, A MEMS Threshold Acceleration Switch Powered by a Triboelectric Generator
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Topics: Generators, Microelectromechanical systems, Switches, Electrodes, Sensors, Levitation, Cantilever beams, Cantilevers, Circuits, Dynamic response
Proceedings Papers

Parametric Excitation of a Repulsive Force Actuator

Mark Pallay, Shahrzad Towfighian
Proc. ASME. IDETC-CIE2017, Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, V004T09A005, August 6–9, 2017
Paper No: DETC2017-67381
DOI: https://doi.org/10.1115/DETC2017-67381
View Paper titled, Parametric Excitation of a Repulsive Force Actuator
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Topics: Actuators, Electrodes, Equations of motion, Excitation, Microelectromechanical systems, Oscillations, Resonance, Sensors, Signal to noise ratio
Journal Articles

Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support

Mark Pallay, Shahrzad Towfighian
Journal: Journal of Vibration and Acoustics
Article Type: Research-Article
J. Vib. Acoust. April 2017, 139(2): 021002.
Paper No: VIB-16-1229
DOI: https://doi.org/10.1115/1.4034954
Published Online: December 7, 2016
View Article titled, Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support
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Topics: Cantilever beams, Design, Microelectromechanical systems, Resonance, Sensors, Stiffness, Frequency response, Springs, Dimensions, Vibration