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Keywords: hybrid technique
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2020, 8(3): 031002.
Paper No: JMNM-19-1081
Published Online: April 30, 2020
... the proposed hybrid technique. The average surface roughness values in the microchannel are decreased compared to that of scribing in water and air. The hybrid approach of laser-based scribing combined with electrochemical etching in neutral salt solutions allows uniform channel with almost no redeposit layer...