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Keywords: graphene growth
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2020, 8(3): 031005.
Paper No: JMNM-20-1006
Published Online: October 26, 2020
... on graphene quality in a low-pressure chemical vapor deposition (LPCVD) graphene growth process. A fractional factorial design of experiment is conducted to provide understanding on not only the main effect of process parameters, but also the interaction effect among them. Graphene quality including...