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Keywords: microfabrication
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Journal Articles

Development of a Fabrication Process for the Manufacturing of a Microspherical Probe for Coordinate Measuring Machine Applications

H. Ji, J. Chua, H.-Y. Hsu, A. B. Wedding
Journal: Journal of Mechanical Design
Article Type: Research Papers
J. Mech. Des. November 2011, 133(11): 111003.
DOI: https://doi.org/10.1115/1.4005084
Published Online: November 11, 2011
... of microscale structure measurement applications. design process design for manufacturing design optimization Taguchi method microspherical tip optical fiber probe coordinate measuring machines discharges (electric) microfabrication probes Taguchi methods 17 05 2011 01 09...
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Topics: Coordinate measuring machines, Fibers, Manufacturing, Probes, Taguchi methods, Optical fiber
Journal Articles

Piezoelectric T-Beam Actuators

Hareesh K. R. Kommepalli, Kiron Mateti, Christopher D. Rahn, Srinivas A. Tadigadapa
Journal: Journal of Mechanical Design
Article Type: Research Papers
J. Mech. Des. June 2011, 133(6): 061003.
DOI: https://doi.org/10.1115/1.4004002
Published Online: June 15, 2011
... can bend in both in-plane and out-of-plane directions upon actuation. Analytical models predict the tip displacement and blocking force in both directions. Six mesoscale T-beam prototypes are monolithically fabricated by machining and microfabrication techniques and experimentally tested for in-plane...
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Topics: Actuators, Displacement, Flanges, Optimization, Electrodes