...Shiwei Deng; Yancheng Wang; Jiafeng Cheng; Wenjie Shen; Deqing Mei Silicon carbide (SiC) has been widely utilized in the semiconductor industry for the development of high-power electrical devices. Using chemical vapor deposition to grow a thin epitaxial layer onto the SiC substrate surface...

... the optically transparent diamond tool and emerges at the tool-workpiece interface, in the chip formation zone. This work is mainly focused on ductile mode machining of Silicon Carbide. 2D Numerical simulations were conducted using the software AdvantEdge (developed by Third Wave Systems) to predict the cutting...