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Keywords: gas flowrate
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070901.
Paper No: MANU-23-1294
Published Online: April 22, 2024
... reaction chamber gas flowrate micro- and nano-machining and processing nontraditional manufacturing processes Silicon carbide (SiC) is a well-known semiconductor material that has been widely used for high-power and high-frequency electronic devices such as power electronics, automotive...
