A complete dynamic model for the simulation of the valve-less piezoelectric pump performance is presented. In this model the piezoelectric action is considered as a periodic force acting on a pumping membrane. The natural frequency of the pump is calculated as well as its performance as a function of the driving frequency. The effect of the deviation of the driving frequency from the natural frequency on the pump performances is clearly shown. Also, it is demonstrated that the effect of the liquid mass in the pump nozzles on the natural frequency of the system is very high owing to the high acceleration of the fluid in the nozzles. Comparison with experiments shows a very good agreement with a minimal number of adjusting parameters.

1.
Shuchi
,
S.
, and
Esashi
,
M. E.
,
1994
, “
Microflow devices and systems
,”
J. Micromech. Microeng.
,
4
, pp.
157
171
.
2.
Gerlach
,
T.
,
Schuenemann
,
M.
, and
Wurmus
,
H.
,
1995
, “
A new micropump principle of the reciprocating type using pyramidic micro flow channels as passive valves
,”
J. Micromech. Microeng.
,
6
, pp.
199
201
.
3.
Olsson
,
A.
,
Enoksson
,
P.
,
Stemme
,
G.
, and
Stemme
,
E.
,
1996
, “
A valve-less planar pump isotropically etched in silicon
,”
J. Micromech. Microeng.
,
6
, pp.
87
91
.
4.
Heschell
,
M.
,
Mu¨llenborn
,
M.
, and
Bouwstra
,
S.
,
1997
, “
Fabrication and characterization of truly 3-D diffuser/nozzle microstructures in silicon
,”
J. Microelectromech. Syst.
,
6
, pp.
41
46
.
5.
Olsson
,
A.
,
Enoksson
,
P.
,
Stemme
,
G.
, and
Stemme
,
E.
,
1997
, “
Micromachined flat-walled valveless diffuser pumps
,”
J. Microelectromech. Syst.
,
6
, pp.
161
166
.
6.
Stemme
,
E.
, and
Stemme
,
G.
,
1993
, “
A valveless diffuser/nozzle-based fluid pump
,”
Sens. Actuators A
,
39
, pp.
159
167
.
7.
Olsson
,
A.
,
Stemme
,
G.
, and
Stemme
,
E.
,
1995
, “
A valve-less planar fluid pump with two pumps chambers
,”
Sens. Actuators A
,
46/47
, pp.
549
556
.
8.
Ullmann
,
A.
,
1998
, “
The piezoelectric valve-less pump-Performance enhancement analysis
,”
Sens. Actuators A
,
69/1
, pp.
97
105
.
9.
Olsson
,
A.
,
Stemme
,
G.
, and
Stemme
,
E.
,
1999
, “
A numerical design study of the valveless diffuser pump using a lumped-mass model
,”
J. Micromech. Microeng.
,
9
, pp.
34
44
.
10.
Timoshenko S., 1940, Theory of Plates and Shells, McGraw-Hill, New York.
You do not currently have access to this content.