A microfluidic mixing device for microsystems with electroosmotic flow (EOF)-driven liquid pumping is proposed and examined experimentally and numerically. Microchannels with or wall are fabricated by using surface micromachining technique, and the EOF velocity for each microchannel is measured. A sample device where part of the wall is covered with a patterned thin film is fabricated to demonstrate the proposed flow pattern change. Results of numerical calculations suggest mixing enhancement effect.
Issue Section:Research Papers
Keywords:silicon compounds, alumina, microfluidics, micromachining, channel flow, electrophoresis, osmosis, numerical analysis, mixing
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