...Garrett M. Clayton; Szuchi Tien; Kam K. Leang; Qingze Zou; Santosh Devasia Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences...

...Jingyan Dong; Srinivasa M. Salapaka; Placid M. Ferreira This paper presents the design, model identification, and control of a parallel-kinematic X Y Z nanopositioning stage for general nanomanipulation and nanomanufacturing applications. The stage has a low degree-of-freedom monolithic parallel...

.... The controller is experimentally implemented on a three-dimensional nanopositioning stage for surface topography tracking, a problem typically encountered in scanning probe microscopy applications. After hitting an internal turning point, its associated minor hysteresis loop is no longer useful...

... bandwidth should be made for nanopositioning. Experimental results including a 250 μ m step response, sinusoidal and square-wave trajectories, and spherical motion generation demonstrated the three-dimensional (3D) nanoscale motion-control capability of this minimum-actuator magnetic levitator. Potential...