...R. Parker Eason; Andrew J. Dick Displacement measurement in atomic force microscopy (AFM) is most commonly obtained indirectly by measuring the slope of the AFM probe and applying a calibration factor. Static calibration techniques operate on the assumption that the probe response approximates...

...Nader Jalili; Laxman Saggere; Arvind Raman 10 11 2009 10 11 2009 atomic force microscopy manipulators nanoelectromechanical devices scanning probe microscopy Most of today's emerging nanotechnological applications such as nanoelectromechanical systems require...

...Georg E. Fantner; Daniel J. Burns; Angela M. Belcher; Ivo W. Rangelow; Kamal Youcef-Toumi New developments in MEMS (microelectromechanical systems) fabrication allowed the development of new types of atomic force microscopy (AFM) sensor with integrated readout circuit and actuator built...

... Flow Mixing Conditions ,” Cryst. Growth Des. 1528-7483 , 4 , pp. 1045 – 1052 . 10.1021/cg049913l Croft , D. , Shedd , G. , and Devasia , S. , 2001 , “ Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application ,” ASME J. Dyn. Syst...

.... 033104 . 10.1063/1.2164394 Rubio-Sierra , F. J. , Heckl , W. M. , and Stark , R. W. , 2005 , “ Nanomanipulation by Atomic Force Microscopy ,” Adv. Eng. Mater. 1438-1656 , 7 ( 4 ), pp. 193 – 196 . 10.1002/adem.200400174 Fearing , R. S. , 1995 , “ Survey of Sticking...

...Amin Salehi-Khojin; Saeid Bashash; Nader Jalili; Gary Lee Thompson; Alexey Vertegel Piezoresponse force microscopy (PFM) is an atomic force microscopy-based approach utilized for measuring local properties of piezoelectric materials. The objective of this study is to propose a practical framework...

...) standard RC, and (3) the modified RC with phase lead compensation. The results show that the latter reduces the steady-state tracking error to less than 2% at 25 Hz scan rate, an over 80% improvement compared with PID control. 30 05 2008 22 05 2009 30 10 2009 atomic force microscopy...

... 05 2009 30 10 2009 atomic force microscopy beams (structures) calibration cantilevers displacement measurement elastic constants error analysis Q-factor scanning electron microscopy The atomic force microscope (AFM) has long since proven its utility for imaging at very...

... 03 2008 01 08 2008 adhesion atomic force microscopy design engineering errors flexible structures force measurement oscillations piezoelectric actuators position control tracking In this article, we study two issues encountered in the design and track of scan...

... received by the ASME Dynamic Systems and Control Division December 9, 2003. Associate Editor: E. Misawa. 09 December 2003 03 12 2004 reduced order systems atomic force microscopy molecular biophysics proteins numerical analysis nonlinear dynamical systems linear systems...

... atomic force microscopy piezoelectric actuators beams (structures) dynamic response The atomic force ( 1 ) between the tip and sample of the atomic force microscope (AFM) is employed during the process of measurement. Some important observations of the AFM were made from the governing...

... in the ASME JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL . Manuscript received by the ASME Dynamic Systems and Control Division May 13, 2003; final revision, October 23, 2003. Associate Editor: R. Gao. 13 May 2003 23 October 2003 05 08 2004 atomic force microscopy...

.... 19 November 1999 atomic force microscopy piezoelectric actuators creep compensation micropositioning elastic hysteresis vibration control Piezoactuators have widely been used in a variety of applications such as noise-and-vibration control, and aerospace positioning systems...

... Contributed by the Dynamic Systems and Control Division of THE AMERICAN SOCIETY OF MECHANICAL ENGINEERS . Manuscript received by the Dynamic Systems and Control Division January 30, 1998. Associated Technical Editor: N. O. Olgac. 30 January 1998 atomic force microscopy scanning probe...