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Journal Articles

Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping

Chu Rainer Kwang-Hua
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. September 2020, 142(9): 094502.
Paper No: DS-19-1164
https://doi.org/10.1115/1.4047012
Published Online: May 11, 2020
View Article titled, Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping
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Topics: Cantilevers, Damping, Fluids, Microelectromechanical systems, Pressure, Q-factor, Knudsen number, Energy dissipation, Resonance, Semiconductor wafers
Journal Articles

Trajectory Planning for Robot Manipulators Considering Kinematic Constraints Using Probabilistic Roadmap Approach

Xiaowen Yu, Yu Zhao, Cong Wang, Masayoshi Tomizuka
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. February 2017, 139(2): 021001.
Paper No: DS-16-1118
https://doi.org/10.1115/1.4034748
Published Online: October 18, 2016
View Article titled, Trajectory Planning for Robot Manipulators Considering Kinematic Constraints Using Probabilistic Roadmap Approach
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Topics: B-splines, Kinematics, Robots, Trajectories (Physics), Optimization, Semiconductor wafers, Manipulators
Journal Articles

Lumped-Parameter Modeling of an Immersion Flow Field for Analyzing Meniscus Dynamic Behavior

Ying Chen, Kok-Meng Lee, Chun-Yeon Lin, Xin Fu
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. January 2014, 136(1): 011001.
Paper No: DS-12-1298
https://doi.org/10.1115/1.4024889
Published Online: August 30, 2013
View Article titled, Lumped-Parameter Modeling of an Immersion Flow Field for Analyzing Meniscus Dynamic Behavior
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Topics: Displacement, Flow (Dynamics), Fluids, Lenses (Optics), Modeling, Semiconductor wafers, Surface tension, Transients (Dynamics), Drag (Fluid dynamics), Lithography
Journal Articles

Nominal and Robust Feedforward Design With Time Domain Constraints Applied to a Wafer Stage

Edgar de Gelder, Marc van de Wal, Carsten Scherer, Camile Hol, Okko Bosgra
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. June 2006, 128(2): 204–215.
https://doi.org/10.1115/1.2192821
Published Online: April 4, 2005
View Article titled, Nominal and Robust Feedforward Design With Time Domain Constraints Applied to a Wafer Stage
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Topics: Control equipment, Design, Feedforward control, Semiconductor wafers, Servomechanisms, Signals, Transfer functions, Uncertainty, Errors, Linear programming