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Journal Articles

Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping

Chu Rainer Kwang-Hua
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. September 2020, 142(9): 094502.
Paper No: DS-19-1164
https://doi.org/10.1115/1.4047012
Published Online: May 11, 2020
View Article titled, Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping
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Topics: Cantilevers, Damping, Fluids, Microelectromechanical systems, Pressure, Q-factor, Knudsen number, Energy dissipation, Resonance, Semiconductor wafers
Journal Articles

Variable Structure Control of a Mass Spring Damper Subjected to a Unilateral Constraint: Application to Radio-Frequency MEMS Switches

Amer L. Allafi, Premjeet Chahal, Ranjan Mukherjee, Hassan K. Khalil
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. August 2018, 140(8): 081004.
Paper No: DS-17-1081
https://doi.org/10.1115/1.4039153
Published Online: March 7, 2018
View Article titled, Variable Structure Control of a Mass Spring Damper Subjected to a Unilateral Constraint: Application to Radio-Frequency MEMS Switches
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Topics: Dampers, Microelectromechanical systems, Springs, Switches, Transients (Dynamics), Stability, Stiffness
Journal Articles

Redundant MEMS-Based Inertial Navigation Using Nonlinear Observers

Robert. H. Rogne, Torleiv. H. Bryne, Thor. I. Fossen, Tor. A. Johansen
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. July 2018, 140(7): 071001.
Paper No: DS-17-1023
https://doi.org/10.1115/1.4038647
Published Online: January 9, 2018
View Article titled, Redundant MEMS-Based Inertial Navigation Using Nonlinear Observers
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Topics: Flaw detection, Microelectromechanical systems, Navigation, Parity (Physics), Sensors, Accelerometers, Vessels, Algorithms
Journal Articles

Frequency Shifts of Micro and Nano Cantilever Beam Resonators Due to Added Masses

Adam Bouchaala, Ali H. Nayfeh, Mohammad I. Younis
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. September 2016, 138(9): 091002.
Paper No: DS-15-1599
https://doi.org/10.1115/1.4033075
Published Online: May 25, 2016
View Article titled, Frequency Shifts of Micro and Nano Cantilever Beam Resonators Due to Added Masses
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Topics: Cantilever beams, Carbon nanotubes, Eigenvalues, Galerkin method, Microbeams, Sensors, Resonance, Noise (Sound), Microelectromechanical systems, Vibration
Journal Articles

Adaptive Fuzzy Sliding Mode Control of MEMS Gyroscope Sensor Using Fuzzy Switching Approach

Juntao Fei, Mingyuan Xin
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. May 2015, 137(5): 051002.
Paper No: DS-12-1229
https://doi.org/10.1115/1.4028812
Published Online: May 1, 2015
View Article titled, Adaptive Fuzzy Sliding Mode Control of MEMS Gyroscope Sensor Using Fuzzy Switching Approach
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Topics: Sliding mode control, Microelectromechanical systems, Fuzzy logic
Journal Articles

Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency

Dumitru I. Caruntu, Martin W. Knecht
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. April 2015, 137(4): 041016.
Paper No: DS-12-1363
https://doi.org/10.1115/1.4028887
Published Online: April 1, 2015
View Article titled, Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency
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Topics: Cantilevers, Microelectromechanical systems, Steady state, Frequency response, Casimir force, Damping
Journal Articles

Frequency Sweeping With Concurrent Parametric Amplification

Nicholas J. Miller, Steven W. Shaw
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. March 2012, 134(2): 021007.
https://doi.org/10.1115/1.4005363
Published Online: December 30, 2011
View Article titled, Frequency Sweeping With Concurrent Parametric Amplification
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Topics: Excitation, Resonance, Pumps, Stability, Q-factor, Sensors, Microelectromechanical systems
Journal Articles

The Effect of Squeeze-Film Damping on the Shock Response of Clamped-Clamped Microbeams

Hadi Yagubizade, Mohammad I. Younis
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. January 2012, 134(1): 011017.
https://doi.org/10.1115/1.4004789
Published Online: December 5, 2011
View Article titled, The Effect of Squeeze-Film Damping on the Shock Response of Clamped-Clamped Microbeams
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Topics: Damping, Microbeams, Pressure, Shock (Mechanics), Microelectromechanical systems
Journal Articles

Lyapunov-Based Stabilization of MEMS Relays

Y. Bastani, M. S. de Queiroz
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. January 2009, 131(1): 014503.
https://doi.org/10.1115/1.3023134
Published Online: December 5, 2008
View Article titled, Lyapunov-Based Stabilization of MEMS Relays
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Topics: Control equipment, Electrodes, Microelectromechanical systems, State feedback, Uncertainty, Transients (Dynamics), Feedback, Stability, Simulation results, Design
Journal Articles

Characterization of the Dynamical Response of a Micromachined G-Sensor to Mechanical Shock Loading

Daniel Jordy, Mohammad I. Younis
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. July 2008, 130(4): 041003.
https://doi.org/10.1115/1.2936849
Published Online: June 4, 2008
View Article titled, Characterization of the Dynamical Response of a Micromachined G-Sensor to Mechanical Shock Loading
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Topics: Damping, Sensors, Shock (Mechanics), Dynamic response, Microelectromechanical systems, Stiction, Transients (Dynamics), Micromachining
Journal Articles

Modeling and Control of Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties

Guchuan Zhu, Julien Penet, Lahcen Saydy
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. November 2007, 129(6): 786–794.
https://doi.org/10.1115/1.2789469
Published Online: February 5, 2007
View Article titled, Modeling and Control of Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties
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Topics: Control equipment, Control systems, Design, Errors, Microelectromechanical systems, Modeling, Uncertainty, Damping, Trajectories (Physics), Cascades (Fluid dynamics)
Journal Articles

An Approach for Model Updating of a Multiphysics MEMS Micromirror

Ryan J. Link, David Zimmerman
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. May 2007, 129(3): 357–366.
https://doi.org/10.1115/1.2719775
Published Online: September 5, 2006
View Article titled, An Approach for Model Updating of a Multiphysics MEMS Micromirror
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Topics: Design, Eigenvalues, Mirrors, Microelectromechanical systems, Genetic algorithms, Optimization, Modeling, Algorithms, Actuators, Finite element analysis
Journal Articles

New Adaptive Mode of Operation for MEMS Gyroscopes

Sungsu Park, Roberto Horowitz
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Article
J. Dyn. Sys., Meas., Control. December 2004, 126(4): 800–810.
https://doi.org/10.1115/1.1849252
Published Online: March 11, 2005
View Article titled, New Adaptive Mode of Operation for MEMS Gyroscopes
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Topics: Adaptive control, Damping, Manufacturing, Microelectromechanical systems, Resolution (Optics), Errors, Dynamics (Mechanics), Resonance, Design, Stability
Journal Articles

Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output Feedback

D. H. S. Maithripala, Jordan M. Berg, W. P. Dayawansa
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. September 2005, 127(3): 443–450.
https://doi.org/10.1115/1.1985443
Published Online: August 17, 2004
View Article titled, Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output Feedback
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Topics: Feedback, Microelectromechanical systems, Electrodes, Damping
Journal Articles

Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing

X. Sun, Graduate Student, R. Horowitz, Professor, K. Komvopoulos, Professor, Fellow ASME
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. December 2002, 124(4): 599–605.
https://doi.org/10.1115/1.1514658
Published Online: December 16, 2002
View Article titled, Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing
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Topics: Control systems, Excitation, Fatigue testing, Microelectromechanical systems, Noise (Sound), Nonlinear dynamical systems, Resolution (Optics), Simulation results, Stability, Fatigue
Journal Articles

System Identification of a MEMS Gyroscope

Robert T. M’Closkey, Assistant Professor, Steve Gibson, Professor, Jason Hui, Graduate Research Assistant
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. June 2001, 123(2): 201–210.
https://doi.org/10.1115/1.1369360
Published Online: June 10, 1999
View Article titled, System Identification of a MEMS Gyroscope
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Topics: Damping, Dynamics (Mechanics), Electrodes, Errors, Filters, Microelectromechanical systems, Sensors, Stiffness, Transfer functions, Signals