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Keywords: microsensors
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Journal Articles
Article Type: Research Papers
J. Comput. Nonlinear Dynam. October 2010, 5(4): 041014.
Published Online: August 17, 2010
... microsensors sensitivity Chemical reactions occurring on one side of the sensor result in surface stress changes that cause the cantilever to deflect and shift its resonance-frequency ( 2 3 ). These chemically induced mechanical forces can be estimated by measuring the cantilever deflection...