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Proceedings Papers

Improving the Accuracy of Microscopic Laser Interferometry System for Precision Surface Measurement by Integrated Scanning Motions

Kee S. Moon, Yiding Wang

Proc. ASME. IMECE97, Manufacturing Science and Engineering: Volume 1, 209-215, November 16–21, 1997

Paper No: IMECE1997-1094

DOI: https://doi.org/10.1115/IMECE1997-1094

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Topics: Interferometry, Lasers, Resolution (Optics), Computer simulation, Design, Diffraction patterns, Instrumentation, Magnification, Measurement systems, Surface texture

Proceedings Papers

Applications of Digital Correlation Method to Microscopic Strain Measurement and Materials’ Property Characterization

H. Lu

Proc. ASME. IMECE97, Manufacturing Science and Engineering: Volume 1, 423-428, November 16–21, 1997

Paper No: IMECE1997-1119

DOI: https://doi.org/10.1115/IMECE1997-1119

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Topics: Hardware, Manufacturing, Reliability, Resolution (Optics), Strain measurement

Proceedings Papers

Direct Observation of Contact Damage Produced by Vickers Indentation in Diamond-Like Films

Vispi Homi Bulsara, Srinivasan Chandrasekar, Thomas N. Farris

Proc. ASME. IMECE97, Composites and Functionally Graded Materials, 287-292, November 16–21, 1997

Paper No: IMECE1997-0675

DOI: https://doi.org/10.1115/IMECE1997-0675

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Topics: Damage, Diamond films, Stress, Delamination, Adhesives, Cracking (Materials), Failure, Force sensors, Fracture (Materials), Fracture (Process)

Proceedings Papers

A Dynamic Computed Tomography Technique for In Vitro Measurements of Local Aortic Elastic Modulus

Mark Lee, Maria Drangova, David Holdsworth

Proc. ASME. IMECE97, Advances in Bioengineering, 337-338, November 16–21, 1997

Paper No: IMECE1997-0366

DOI: https://doi.org/10.1115/IMECE1997-0366

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Topics: Computerized tomography, Elastic moduli, Atherosclerosis, Materials properties, Physiology, Pressure, Resolution (Optics), Vessels

Proceedings Papers

New Laser-Based Optical Position Sensor With Applications to Robot End-Effector Motion

W. N. White, B. T. Beck, V. Garimella

Proc. ASME. IMECE97, Dynamic Systems and Control, 337-345, November 16–21, 1997

Paper No: IMECE1997-0414

DOI: https://doi.org/10.1115/IMECE1997-0414

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Topics: End effectors, Lasers, Robots, Sensors, Computer software, Degrees of freedom, Dimensions, Hardware, Mechanical engineering, Resolution (Optics)

Proceedings Papers

The Role of Electric-Current Induced Heating in Damage Evolution at the Crack Tip in Thin Film Conductors

Ashraf -F. Bastawros, Kyung -S. Kim

Proc. ASME. IMECE97, Application of Fracture Mechanics in Electronic Packaging, 139-144, November 16–21, 1997

Paper No: IMECE1997-0509

DOI: https://doi.org/10.1115/IMECE1997-0509

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Topics: Damage, Electric current, Fracture (Materials), Heating, Thin films, Aluminum, Electrodes, Temperature, Melting, Coating processes

Proceedings Papers

Longitudinal Wave Response of an Elastic-Viscoelastic-Elastic Laminate With a Shear Voigt Damping Core

B. E. Douglas

Proc. ASME. IMECE97, Active/Passive Vibration Control and Nonlinear Dynamics of Structures, 25-30, November 16–21, 1997

Paper No: IMECE1997-0556

DOI: https://doi.org/10.1115/IMECE1997-0556

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Topics: Damping, Laminates, Longitudinal waves, Shear (Mechanics), Mechanical admittance, Waves, Antiresonance, Equations of motion, Resolution (Optics), Resonance

Proceedings Papers

High Resolution Single Crystal Silicon Accelerometer Using Silicon Fusion Bonding and Deep Reactive Ion Etching

B. P. van Drieënhuizen, N. I. Maluf

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 9-12, November 16–21, 1997

Paper No: IMECE1997-0931

DOI: https://doi.org/10.1115/IMECE1997-0931

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Topics: Accelerometers, Bonding, Crystals, Reactive-ion etching, Resolution (Optics), Silicon, Noise (Sound), Complementary metal oxide semiconductors, Brownian motion, Electronics

Proceedings Papers

Nanoscale Thermometry Using Scanning Joule Expansion Microscopy

Arun Majumdar, John Varesi

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 171-179, November 16–21, 1997

Paper No: IMECE1997-0955

DOI: https://doi.org/10.1115/IMECE1997-0955

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Topics: Joules, Microscopy, Nanoscale phenomena, Temperature measurement, Atomic force microscopy, Imaging, Metals, Resolution (Optics), Signals, Temperature distribution

Proceedings Papers

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

C. H. Liu, J. K. Reynolds, A. Partridge, J. D. Grade, A. M. Barzilai, T. W. Kenny, H. K. Rockstad

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 13-20, November 16–21, 1997

Paper No: IMECE1997-0932

DOI: https://doi.org/10.1115/IMECE1997-0932

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Topics: Accelerometers, Electrons, Micromachining, Transducers, Tunnel construction, Resonance, Silicon, Acoustics, Design, Manufacturing

Proceedings Papers

Digital Micromirror Device™: Commercialization of a Massively Parallel MEMS Technology

Larry J. Hornbeck, T. Russ Howell, Richard L. Knipe, Michael A. Mignardi

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 3-8, November 16–21, 1997

Paper No: IMECE1997-0930

DOI: https://doi.org/10.1115/IMECE1997-0930

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Topics: Microelectromechanical systems, Circuits, Complementary metal oxide semiconductors, Manufacturing, Reliability, Resolution (Optics), Switches

Proceedings Papers

Scanning Laser Thermoelectric Microscope for Thin Film Thermophysical Property Measurement

Theodorian Borca Tasciuc, Gang Chen

Proc. ASME. IMECE97, Heat Transfer: Volume 1, 297-303, November 16–21, 1997

Paper No: IMECE1997-0855

DOI: https://doi.org/10.1115/IMECE1997-0855

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Topics: Lasers, Microscopes, Thin films, Laser beams, Thermal diffusivity, Thermocouples, Waves, Bulk solids, Fittings, Glass

Proceedings Papers

Microscopic Study on Heat Transfer and Thermophysical Properties of Composite Material

Osamu Nakabeppu, Masanobu Igeta, Kunio Hijikata

Proc. ASME. IMECE97, Heat Transfer: Volume 1, 287-295, November 16–21, 1997

Paper No: IMECE1997-0854

DOI: https://doi.org/10.1115/IMECE1997-0854

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Topics: Composite materials, Heat transfer, Carbon reinforced plastics, Resolution (Optics), Atomic force microscopy, Microscale devices, Pressure, Temperature, Visualization, Atmospheric pressure

Proceedings Papers

Control of Distributed Actuators Without Electrodes

John A. Main

Proc. ASME. IMECE97, Adaptive Structures and Material Systems, 61-66, November 16–21, 1997

Paper No: IMECE1997-0178

DOI: https://doi.org/10.1115/IMECE1997-0178

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Topics: Actuators, Electrodes, Cathode ray oscilloscopes, Electron beams, Electrons, Piezoelectric materials, Advanced materials, Design, Smart materials, Wire

Proceedings Papers

Analytical Feasibility of Laser Induced Stress Wave Thermometry Applied to Silicon Wafers

G. Andrew Rabroker, C. Steve Suh, Christian P. Burger, Ravinder Chona

Proc. ASME. IMECE97, Applications of Experimental Mechanics to Electronic Packaging, 45-50, November 16–21, 1997

Paper No: IMECE1997-1226

DOI: https://doi.org/10.1115/IMECE1997-1226

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Topics: Lasers, Semiconductor wafers, Stress, Temperature measurement, Waves, Temperature, Anisotropy, Dispersion relations, Elastic constants, Rapid thermal processing

Proceedings Papers

Modification of Golay’s Theory for Rectangular Microfabricated Gas Chromatographic Columns

Glenn E. Spangler

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 215-222, November 15–20, 1998

Paper No: IMECE1998-1245

DOI: https://doi.org/10.1115/IMECE1998-1245

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Topics: Microfabrication, Diffusion (Physics), Flow (Dynamics), Gas chromatography, Pressure, Resolution (Optics)

Proceedings Papers

Design, Testing, and Simulation of Microscale Gas Chromatography Columns

Mary L. Hudson, Richard Kottenstette, Carolyn M. Matzke, Greg C. Frye-Mason, Kim A. Shollenberger, Doug R. Adkins, C. Channy Wong

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 207-214, November 15–20, 1998

Paper No: IMECE1998-1244

DOI: https://doi.org/10.1115/IMECE1998-1244

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Topics: Design, Gas chromatography, Microscale devices, Simulation, Testing, Resolution (Optics), Chemistry, Dimensions, Etching, Plates (structures)

Proceedings Papers

Micro-Stereolithography for MEMS

X. Zhang, X. N. Jiang, C. Sun

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 3-9, November 15–20, 1998

Paper No: IMECE1998-1216

DOI: https://doi.org/10.1115/IMECE1998-1216

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Topics: Microelectromechanical systems, Stereolithography, Ceramics, Computer-aided design, Computers, Design, Lasers, Manufacturing, Microchannels, Microgears

Proceedings Papers

Velocimetry for MEMS Applications

Steven T. Wereley, Carl D. Meinhart, Juan G. Santiago, Ron J. Adrian

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 453-459, November 15–20, 1998

Paper No: IMECE1998-1284

DOI: https://doi.org/10.1115/IMECE1998-1284

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Topics: Microelectromechanical systems, Particulate matter, Flow (Dynamics), Resolution (Optics), Algorithms, Brownian motion, Errors, Erythrocytes, Microfluidics, Microscopy

Proceedings Papers

Design of Resonant Beam Transducers: An Axial Force Probe for Atomic Force Microscopy

Jonah A. Harley, Eugene M. Chow, Thomas W. Kenny

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 247-252, November 15–20, 1998

Paper No: IMECE1998-1249

DOI: https://doi.org/10.1115/IMECE1998-1249

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Topics: Atomic force microscopy, Design, Probes, Resonance, Transducers, Oscillations, Resolution (Optics), Design engineering, Dimensions, Elastic constants

2 3 4 5

NARROW

Improving the Accuracy of Microscopic Laser Interferometry System for Precision Surface Measurement by Integrated Scanning Motions

Applications of Digital Correlation Method to Microscopic Strain Measurement and Materials’ Property Characterization

Direct Observation of Contact Damage Produced by Vickers Indentation in Diamond-Like Films

A Dynamic Computed Tomography Technique for In Vitro Measurements of Local Aortic Elastic Modulus

New Laser-Based Optical Position Sensor With Applications to Robot End-Effector Motion

The Role of Electric-Current Induced Heating in Damage Evolution at the Crack Tip in Thin Film Conductors

Longitudinal Wave Response of an Elastic-Viscoelastic-Elastic Laminate With a Shear Voigt Damping Core

High Resolution Single Crystal Silicon Accelerometer Using Silicon Fusion Bonding and Deep Reactive Ion Etching

Nanoscale Thermometry Using Scanning Joule Expansion Microscopy

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

Digital Micromirror Device™: Commercialization of a Massively Parallel MEMS Technology

Scanning Laser Thermoelectric Microscope for Thin Film Thermophysical Property Measurement

Microscopic Study on Heat Transfer and Thermophysical Properties of Composite Material

Control of Distributed Actuators Without Electrodes

Analytical Feasibility of Laser Induced Stress Wave Thermometry Applied to Silicon Wafers

Modification of Golay’s Theory for Rectangular Microfabricated Gas Chromatographic Columns

Design, Testing, and Simulation of Microscale Gas Chromatography Columns

Micro-Stereolithography for MEMS

Velocimetry for MEMS Applications

Design of Resonant Beam Transducers: An Axial Force Probe for Atomic Force Microscopy

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