It was found experimentally from our previous study that the operation of the piezoelectric actuator (PEA) and the friction in the piezoelectric stick-slip actuator (PE-SSA) can cause significant rise in temperature, thereby degrading the performance of the actuator. This paper presents a dynamic model for the PE-SSA by taking into account thermal effect. In particular, the dynamic model is developed by integrating the PEA model proposed by Adriaens et al. [1] and the LuGre friction model proposed by De Wit et al. [2]; the parameters involved in the models are determined using a system identification approach. Experiments are carried out to verify the effectiveness of the model. It is shown that the simulation and experimental results are in a good agreement. This study provides a new way to model thermal effect for other micro motion systems.

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