Nonlinear harmonic vibration analysis of a clamped-clamped micro-beam is studied in this paper. Nonlinear forced vibration of a special kind of micro-actuators is examined for the first time. Galerkin method is employed to derive the equation of motion of the micro-beam with two symmetric potential wells. An electric force composed of DC and AC components is applied to the structure. Multiple Scales method (MSM) is used to solve the nonlinear equation of motion. Primary and secondary resonances are taken into account and steady-state response of the microbeam is obtained. A parametric study is then carried out to investigate the effects of different parameters on the amplitude-frequency curves. Finally, phase plot and Poincare map have been taken into consideration to investigate the influence of the amplitude of the harmonic excitation on stability of the microelectromechanical system.

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