Modeling and Batch Fabrication of Spatial Micro-Manipulators

Pseudo rigid body models (PRBM) may be used to accurately and efficiently model the large elastic deflections of compliant mechanisms. Previously published models have only considered end forces with no end moment or end moment acting only in the same direction as the force. In this paper, we present a model for a cantilever beam with end moment acting in the opposite direction as the end force causing an inflection point. As motivation for the development of such models, we present a novel spatial micro-manipulator which can be modeled with this PRBM. This micro-manipulator is being fabricated as a MEMS device using a 3D fabrication process.