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TECHNICAL PAPERS

RIE-Texturing of Industrial Multicrystalline Silicon Solar Cells

[+] Author and Article Information
Douglas S. Ruby

Sandia National Laboratories,* Albuquerque, NM 87185-0752

Saleem Zaidi

Gratings Inc, Albuquerque NM 87107

S. Narayanan

BP Solar, Frederick, MD 21703

Satoshi Yamanaka

Ebara Solar Inc, Belle Vernon, PA 15012

Ruben Balanga

Shell Solar, Camarillo, CA 93012

J. Sol. Energy Eng 127(1), 146-149 (Feb 07, 2005) (4 pages) doi:10.1115/1.1756926 History: Received September 01, 2003; Revised March 01, 2004; Online February 07, 2005
Copyright © 2005 by ASME
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References

Inomata,  Y., Fukui,  K., Shirasawa,  K., 1997, “Surface Texturing of Large Area Multicrystalline Si Solar Cells Using Reactive Ion Etching Method,” Solar Energy Mat. Solar Cells, 48, Part II, pp. 237–242.
Ruby, D. S., Zaidi, S. H., and Narayanan, S., 2000, “Plasma-Texturization for Multicrystalline Silicon Solar Cells,” Twenty-Eighth IEEE PVSC, pp. 75–78.
Ruby, D. S., Zaidi, S. H., Damiani, B. M., and Rohatgi, A., 2001, “RIE-Texturing of Multicrystalline Silicon Solar Cells,” PVSEC-12, Jeju, Korea, pp. 273–274.
Basore, P. A., 1993 “Extended spectral analysis of IQE,” 23rd IEEE PV Specialists Conf., Louisville, pp. 147–152.

Figures

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Average efficiency±standard deviation for each of the 4 groups of cells.
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IQE and hemispherical reflectance of 3 tri-c Si cells with RIE-textured (conditioned texture), planar, or wet-textured front surfaces. All cells had otherwise identical processing, including single layer antireflection coating.
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Side by side photograph of condition-textured tri-c cell on the left and wet-textured tri-c cell on the right
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Side-by-side photograph of BP Solar cells. Left cell is planar and right cell is RIE-textured with nitric/HF DRE. Both have a commercial single layer ARC
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SEM micrographs of mc-Si surfaces after conditioned texture and nitric/HF DRE treatments of (a) 20 sec, (b) 40 sec, and (c) 60 sec
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Absolute hemispherical spectral reflectance measurements of 4 BP Solar cells, including reflectance of gridlines. Cell c2 corresponds to Fig. 5(a), b2 corresponds to 5(b), and a3 corresponds to 5(c).
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SEM micrographs of mc-Si surfaces after conditioned texture and alkaline DRE treatments of (a) 20 sec, (b) 40 sec, and (c) 60 sec
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Surface Reflectivity with SiNx AR Coating of RIE Textured Dendritic Web cells (before grid metallization)

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